ABSTRACT
A wide variety of wafer containers, holders, storage cases, and shipping boxes for wafers are presently available, and the packing technology has changed over the years in response to changes in wafer size. There is no single industry-standard method of wafer-level packaging at present. Most small wafers are positioned vertically with the top opening, and these boxes are shipped in a sealed container. Larger wafers are positioned horizontally with the front opening. All of the wafers are placed separately without touching each other. Enough gaps are provided inside to handle the individual silicon wafers. Cleaned wafers are packed in these shipping boxes, and the number of wafers in each box varies. Packaging technology has improved in terms of materials and design that add fewer particles during shipping and in storage. Figure 11.1 shows some of the wafer containers [1], and Figure 11.2 outlines the different generations of wafer storage and transportation methods followed by the wafer suppliers [2-4]. Packing materials vary from different plastics to Teon.
