ABSTRACT

A number of new applications, such as self-guided small projectiles and autonomous

surveillance airplanes, have created a requirement for a highly sensitive yet very

small acceleration sensor. The fundamental problem in acceleration sensors is the

size-sensitivity tradeoff [1-4]. Specifically, a highly sensitive acceleration sensor

must necessarily be a large sensor [1-4]. A new miniature acceleration sensor with a

radical new design was recently introduced. The sensor offers a very large dynamic

range and high sensitivity. This new type of acceleration sensor will be available

commercially within a time span of 1-2 years.