ABSTRACT
A number of new applications, such as self-guided small projectiles and autonomous
surveillance airplanes, have created a requirement for a highly sensitive yet very
small acceleration sensor. The fundamental problem in acceleration sensors is the
size-sensitivity tradeoff [1-4]. Specifically, a highly sensitive acceleration sensor
must necessarily be a large sensor [1-4]. A new miniature acceleration sensor with a
radical new design was recently introduced. The sensor offers a very large dynamic
range and high sensitivity. This new type of acceleration sensor will be available
commercially within a time span of 1-2 years.