ABSTRACT
Uncertainties in material properties and structural dimensions are unavoidable at any length scale, but they are particularly important as devices become smaller. This work seeks to identify and quantify the sources and effects of the inherent uncertainty in micro-electro-mechanical systems ( M E M S ) . Methods for assess ing the effects of this uncertainty on overall system response w i l l be developed. Quantitative bounds on the effect of uncertainty for any given design w i l l be ac cessible and, once this is achieved, design variables can be chosen that min imize the effects o f the uncertainties. A n example of robust control applied to M E M S response is provided to demonstrate the potential benefits of this approach.
