ABSTRACT
In monitoring applications, detection of changes in the relative humidity is at least as important as the exact measurement itself. This is especially true for processes whereby the product’s quality is guaranteed by a dry atmosphere. Examples are the packaging of coffee beans and the (industrial) Cl2 formation. Monitoring systems for such applications need to respond immediately to a change of the humidity with a high reliability. Often, monitoring at different locations simultaneously is required. Hence, it is worthwhile to look for an integration of highly sensitive porous silicon humidity sensors and electronics capable of detecting and analysing the humidity variations.
