ABSTRACT

This chapter treats some more recent developments in the generation of nonequilibrium plasmas. Section 6.2 (Kogelschatz), 6.3 (Kogoma, Okazaki) and 6.4 (Laroussi) are devoted to different aspects of barrier discharges. In addition to the traditional dielectric barrier discharges with a seemingly random distribution of microdischarges, regularly patterned and homogeneous dielectric barrier discharges are also addressed, as well as resistive barrier discharges. The various novel applications in surface treatment, in flat plasma display panels, ozone generation, excimer lamps and high power CO2 lasers have attracted much interest and have led to a worldwide increase in research activities in all kinds of barrier discharges.