ABSTRACT
In this paper we compare the composition profiles obtained from a TiN/NbN multilayer using Fresnel analysis and an extended energy-filtered (EFTEM) image series [3]. This multilayer system has aroused much interest for its potential 'ultrahard' properties. Models of the deformation in this system suggest that the amplitude and interface width of the composition profile strongly affect the hardness [4]. The structure of this multilayer was also characterised by X-ray diffraction [5].
