ABSTRACT
J.R. Sun, Z.H. Fang, Ch. Wang, W. Wang, S.Z. Fu, Y. Gu, S.J. Wang Shanghai Institute of Laser Plasma, P.O.Box 800-229, Shanghai, 201800, P. R.China
Abstract: A new experimental method to measure the soft X-ray multilayer beam splitter's reflected and transmitted spectrum has been proposed and carried out with laser-produced plasma x-ray source, flat field grating spectrometer and soft x-ray CCD. Two grazing incident mirrors were employed to eliminate the high-order diffraction disturbance. Reflectivity and transmissivity of the multilayer beam splitter at the designed central wavelength 13.9 nm was measured in one laser shot.
