ABSTRACT
Electron-based EUV and ultrashort hard-x-ray sources B N Chichkov, A Egbert, and U Hinze Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany
Abstract. A brief review of our progress in the realization of femtosecond laser-driven ultrashort hard-x-ray sources is given. New results on the development of a compact electron-based EUV source for at-wavelength metrology and microscopy are presented.
