ABSTRACT
Abstract. This paper reports the effects of post thermal annealing in various ambient gases on the structural and optical properties of ZnO films deposited on Si substrate. Our experiments showed that ZnO films have the better crystal quality after post thermal annealing, especially in H2O ambient and oxygen contents and PL emissions in ZnO films were different with a kind of ambient gases. We will discuss with the relations to oxygen content and structural and optical characteristics.
