ABSTRACT
The aim of this book is to provide a concise reference and descrip tion o f the processes, methods, and equipment for depositing technologi cally important materials. Emphasis is placed on the most recently devel oped processes and techniques of film deposition for applications in high technology, in particular, advanced microelectronic device fabrication that requires the most sophisticated and demanding approaches. The volume is intended to serve as a handbook and guide for the practitioner in the field, as a review and overview of this rapidly evolving technology for the engineer and scientist, and as an introduction to the student in several branches of science and engineering.
