ABSTRACT
In wet bulk micromachining, features are sculpted in the bulk of materials such as silicon, quartz, SiC, GaAs, InP, and Ge by orientation-independent (isotropic) or orientation-dependent (anisotropic) wet etchants. The technology employs pools of liquid as tools,
rather than the plasmas studied in Chapter 2. A vast majority of wet bulk micromachining work is based on single-crystal silicon and glass as a companion material. There has been some work on quartz, crystalline Ge, SiC, and GaAs, and a minor amount on GaP and InP.
