ABSTRACT
In the category of material property measuring equipment, we start with a review of specialized SPMs for material property determination. SPMs are used not only to visualize structures (see SNOM, STM, and AFM, above) but also to analyze a wide variety of material properties such as magnetic, thermal, and mechanical behavior. We then consider tools used to measure conductivity and carrier type of a material. MEMS devices often are mechanically dynamic by nature, hence the need to measure dynamic motion of MEMS devices. We study mechanical properties using interferometry with a stroboscopic light-emitting diode (LED) to freeze device motion and laser Doppler vibrometry to measure contactless velocity and displacement of vibrating structures.
