ABSTRACT
The presence of particulate contamination is determined by direct detection of the particles and is also influenced from the failure of the IC to perform as specified. The most effective control of particulate contamination involves the following items:
I. Identification of the source of the offending particles. 2. Monitoring the manufacturing environment (see Refs. 2 and 3) and
process chemicals and gases (including water) for unacceptable levels of particles. Table 12.1 summarizes the IC fabrication cleanliness requirements for air, deionized water, chemicals, gases, and static charge.
