ABSTRACT

Vacuum technology finds itself in many areas of industry and research. These include materials handling, packaging, gas sampling, filtration, degassing of oils and metals, thin-film coating, electron microscopy, particle acceleration, and impregnation of electrical components. It is vital to design systems that are appropriate to the application, a

chapter |6 pages

Introduction

chapter 1|32 pages

Properties of Gases at Low Pressures

chapter 2|40 pages

Theory

chapter 3|50 pages

Measurement of Vacuum

chapter 4|38 pages

Mechanical Methods of Vacuum Production

chapter 6|44 pages

Analysis of the Vacuum Systems

chapter 7|30 pages

Design of Vacuum Systems

chapter 8|32 pages

Construction of Vacuum Systems

chapter 9|4 pages

Problems