ABSTRACT
In this paper we report on the development of dedicated hardware called “DigiTEM” for JEOL electron microscopes which is interfaced directly to the digital connection between the microscope computer and deflector or lens unit. This hardware is capable of monitoring all the lens and deflector currents in real time through an external PC running standard “Windows” software. In addition any changes that the microscope operator makes to the deflector and lens currents can be continuously updated allowing full duplex remote control. The hardware can also be operated in two other modes allowing respectively, only external control from the host PC or only local (microscope) control with the PC acting in a monitoring function. Within the control software several preprogrammed hardware scan generators are included allowing real time raster or circular scans across several deflectors with arbitrary magnitudes and phase offsets to be generated.
