ABSTRACT
The maximum achievable stroke for normal configuration actuators is l im ited by the elastic region o f the flexure suspension and additionally by the depend ence o f actuation force on plate separation, as given by the above stated equations. According to Fearing, a typical stroke for a surface micromachined normal con figuration actuator is on the order o f a couple o f microns. The achievable dis placement can be increased by forming a stack o f normal-configuration electro static actuators in series, as proposed by Bobbio et al. [8] and Jacobson et al. [9] .
