ABSTRACT
The primary electrons also undergo inelastic interactions, giving rise
to low energy electrons and x-rays. The low energy electrons are of two
types, auger electrons which are not generally detectable using an SEM and
secondary electrons which have energies which range from 3 to 10 eV and can be detected. The secondary electrons are of such low energy that in order
to efficiently detect the electrons, the detector must be surrounded with a
positively biased grid to attract the electrons. A schematic of the inside
of a scanning electron microscope with a secondary electron detector is
illustrated in Fig. 2.
