ABSTRACT

Defects in Optoelectronic Materials bridges the gap between device process engineers and defect physicists by describing current problems in device processing and current understanding of these defects based on defect physics. The volume covers defects and their behaviors in epitaxial growth, in various processes such as plasma processing, deposition and implantation, and in device degradation. This book also provides graduate students cutting-edge information on devices and materials interaction.

part |343 pages

Defects in Device Fabrication

part |64 pages

Defects in Device Operation

chapter Chapter 9|40 pages

Device Degradation