ABSTRACT
Optical waveguide films with vertical mirrors are backbone for
the 3-D OE platform and one of the core technologies in optical
electronics. Vertical mirrors in the optical waveguide films are
necessary for couplings between the optical waveguides and optical
devices such as VCSELs and PDs in the optical waveguide films. The
verticalmirrors are also used for optical Z-connections in 3-D optical
circuits consisting of stacked waveguide films.
