ABSTRACT
In the 3-D optical circuit, which is one of the core technologies in
optical electronics, optical waveguide films are stacked and optical
links between stacked waveguide films are carried out by optical
Z-connections using 45◦ mirrors. In this chapter, 3-D optical circuits fabricated by stacking two
optical waveguide films with vertical mirrors are demonstrated
[1, 2]. As a challenge to reduce the loss at the optical Z-connections,
we fabricate an optical waveguide film with a vertical waveguide
grown above a vertical mirror aperture using SOLNET [1, 2].