ABSTRACT

In the 3-D optical circuit, which is one of the core technologies in

optical electronics, optical waveguide films are stacked and optical

links between stacked waveguide films are carried out by optical

Z-connections using 45◦ mirrors. In this chapter, 3-D optical circuits fabricated by stacking two

optical waveguide films with vertical mirrors are demonstrated

[1, 2]. As a challenge to reduce the loss at the optical Z-connections,

we fabricate an optical waveguide film with a vertical waveguide

grown above a vertical mirror aperture using SOLNET [1, 2].