ABSTRACT

This chapter describes the THz wave imaging techniques that are used in nondestructive analysis technology. From among these, the THz computed tomography (CT) method, which excels as a 3D imaging technique, is described in detail, and examples of its practical application are presented. The latter part of this chapter describes the technology used in the TAS7000 3D imaging analysis system produced by Advantest Corporation; the TAS7000 is the world’s first commercial device to make practical use of this new nondestructive analysis technology. During the process of creating a THz CT device suitable for practical applications, increasing the measurement speed was particularly challenging. This chapter describes in detail the high-speed measurement technique and laser control technology for addressing this problem.