ABSTRACT
Micro and nano technology (MNT) products, often also referred to as MEMS (micro electromechanical systems) or NEMS (nano electromechanical systems) devices are mostly based on semiconductor manufacturing processes. The development of MNT products differs substantially from product engineering (PE) methods used in more traditional industries. The general approach is characterized by the application of specific fabrication flows, i.e. manufacturing process steps are depending on the specific product, using process flow configurations, process parameters and the selection of proper materials which influence the device properties. The concurrency of product design and manufacturing process development makes MNT product engineering a complex task.
