ABSTRACT

Yield modeling has been used for many years in the semiconductor industry. Yield models are now used not only for yield analysis, but also as the basis for automated yield analysis programs. A complete yield model should, therefore, have the following characteristics: Yield modeling is worthwhile and advantageous because: The chapter covers cluster analysis for calculating Y s and Y r. The random defect yield limit (Yr) can then be calculated either: If a statistically appropriate sample size was used for the analysis and if the negative binomial model provides a good fit, the two methods should agree very closely. The is that it provides an excellent cross-check for the results of the yield modeling which partitions the random and systematic yield limits into the subcomponents. The chapter presents a powerful method for determining systematic yield limits called product sensitivity analysis.