ABSTRACT
Fig. 3 shows the streak images and shock wave and current sheet are shown. Streak images demonstrate that the plasma inside the capillary rapidly collapses, heats up and then expands. Fast pulse power supply system produces better plasma symmetry with respect to the axis than the prototype. After stagnation, the plasma column expanded to the wall and the luminous region extended. For confirmation of 13.5 nm EUV radiation and other spectral line such as aluminium and oxygen, time-resolved spectroscope analysis is planed. Detection of debris is conducted and gas curtain system will be prepared for debris mitigation.
