ABSTRACT
Generalexpressionsforthecurvature-incompatibilitystrainrelationshipin thecaseoflargebendingandarbitrarythicknessratiosbetweenˆlmand substratearedeveloped,whichcanbesolvedlargelyanalyticallyinthecase ofcylindricalsymmetry.ItisshownthatthelimitsoftheStoneyformulaare easilyreachedinthecaseof,e.g.,GaNonSi,largediameterwafers,thicklayers,orverticaltemperaturegradients.Asaconsequence,thesurfacestrain becomesanisotropicalreadyatsmallbendingwithapossibleimpacton
CONTENTS
9.1Introduction ................................................................................................366 9.2Single Layers ...............................................................................................368
