ABSTRACT

Many different methods have been developed for the measurement of microsystems and their components. Among others, white-light interferometry, confocal microscopy, and fringe projection are well-established techniques. White-light interferometry and confocal microscopy are of increasing interest because they combine a large measurement range with a very high vertical resolution. Fringe projection is less sensitive, but it offers a higher measurement speed. It has also advantages for medium and large-sized objects in which a very high vertical resolution is not needed.