ABSTRACT
Nano-and microengineering have experienced phenomenal growth over the past few years. These developments are based on far-reaching theoretical, applied, and experimental advances. The synergy of engineering, science, and technology is essential to design, fabricate, and implement nano-and microelectromechanical systems (NEMS and MEMS). These are built with devices (components) including nano-and micromachines. These machines are the nano-and microscale motion devices that can perform actuation, sensing, and computing. Recent trends in engineering and industrial demands have increased the emphasis on integrated synthesis, analysis, and design of nano-and micromachines.
