ABSTRACT
Keywords: Thin films; intrinsic and thermal stresses; measurements of stress; the origin of stress; stress control; stress relaxation.
1. INTRODUCTION
Today, thin films are an indispensable part of modem technology. They play a key role in microelectronics, for example in Very-Large-Scale-Integration systems such as the Central Processing Units and dynamic memories in computers. Thin films are also key components in optical devices such as mirrors, including X-ray mirrors, filters, solar cells, and in various sensors. Also, the application of hard coatings for tribological protection of tools and critical machine parts in the machine industry is increasing.
