ABSTRACT
As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge availab
Volume 1, MEMS: Introduction and Fundamentals. Volume 2, MEMS: Design and Fabrication. Volume 3, MEMS: Applications.
