ABSTRACT

Micromachining ..................................................................................................... 165 8.4 Pulsating Current Magnetic Abrasive Finishing (PC-MAF) ....................................... 165

8.4.1 Effect of Duty Cycle on Percentage Decrease in Surface Roughness ............. 166 8.4.2 Forces and Brush Formation during PC-MAF .................................................. 168

8.5 Finite Element Analysis of MAF Process ....................................................................... 170 8.5.1 Application of Finite Element Method ............................................................... 171

8.5.1.1 Evaluation of Secondary Variables ...................................................... 174 8.5.2 Modeling for Evaluation of Material Removal and Surface Roughness

during MAF ............................................................................................................ 175 8.5.3 Parametric Analysis .............................................................................................. 178

Nomenclature .............................................................................................................................. 180 References ..................................................................................................................................... 181

With the advancements in manufacturing technology, ne surface nish is in high demand in a wide spectrum of industrial applications. The parts used in industries related to the

manufacturing of semiconductors, atomic energy, medical instruments, and similar others require very low values of surface roughness (Yan and Hu, 2005). In recent years, the establishment of micromanufacturing methods for realizing further precision, smoothness, and miniaturization has become increasingly essential in the fabrication/manufacture of various microdevices as functional structures. This demand is particularly strong in the areas of electronics, mechatronics, biology, and medicine. Micromanufacturing technologies play an increasingly decisive role in the miniaturization of products ranging from biomedical devices to chemical microreactors and microsensors. Microslots, complex surfaces, and microholes with micro-to nanosurface nish are produced in large numbers, sometimes in a single workpiece, especially in the electronics industry.