ABSTRACT
In recent years, interest in the eld of microfabrication of electronic, optical, and biomedical devices ranging from sensor to computation and control systems has grown tremendously. Biomedical welding applications range from the construction of precision instruments to the joining of human tissue. The electronics and biomedical industries in particular have recognized the opportunities for miniaturization that precision laser-based microjoining techniques have to offer. There is also an increasing interest in adopting micro/ nanofabrication techniques for various devices such as microelectromechanical systems (MEMS) and other devices involving miniaturization and functional integration. These devices include the gyroscope chip, which can sense tilt, motion, shock, acceleration/deceleration, and vibration; the MEMS-based accelerometer deployed in airbags; pressure sensors and microphones; optical switches; micro total analysis systems; or lab-on-chips.
