chapter  5

MEMS-Based Ultrasonic Devices

WithT. Siu, M. Chiao

Summary

This chapter investigates the use of micro-ultrasonic-transducers (MUTs) for therapeutic applications such as enhancing the transfection efficacy of antisense oligonucleotides (ASOs) for cancer treatment. After a brief description of the two subcategories of MUT and their respective fabrication techniques, some experimental results are discussed. Finally, other potential applications of MUT are outlined and the advantages of MUTs over conventional ultrasonic transducers used in mechatronic applications are discussed.