chapter  5
74 Pages

Metallization

ByGeraldine Cogin Schwartz and K.V. Srikrishnan

Among the factors involved in choosing a metallization system is, as in the case of dielectrics, a need to decrease signal propagation delay for high-speed logic devices. Al and its alloys have been the metals of choice for many years and their processing is well established, but their resistivities (ρ) (2.65 µ cm for Al, higher for alloys) are not the lowest among the known conductors.