ABSTRACT
Molecular contamination: Nonparticulate contaminate material (©lm) without de©nite dimension; volatile species that may be physically or chemically absorbed on surfaces. ¢is includes corrosive and noncorrosive ©lms resulting from oil, greases, chemical residues, ©ngerprints, heat and vacuum applications, chemical action, and incompatible materials, such as ©lms from outgassing.
