ABSTRACT
Supersonic cluster beam deposition was employed to produce nanostructured thin films of transition metal oxides to be used as gas sensors. Due to high nanoparticle beam collimation, patterned deposition was easily obtained by using hard masks, achieving sub-micrometric resolution. To exploit hard mask patterning micro-machined substrates having an array structure were developed in order to deposit materials with different properties on each single element of the array. Results on the deposition of nanostructured TiO2, WO3, SnO2 and on the detection of volatile organic compounds (VOC) and gases related to environmental pollution (such as NOx) are reported.
