chapter  11
30 Pages

High-Frequency Vibrating Nanowire

WithLaurent Duraffourg, Thomas Ernst

Recently, nanowires have been developed to follow the well-known

Moore’s law and to evaluate the physical issues caused by the

dramatic reduction of the gate length of transistors. In this chapter,

we give a technical overview of suspended silicon nanowires

used as high-frequency (HF) vibrating nanoelectromechanical

systems (NEMS). Several applications are being addressed with

such nanosystems. Among them, nanowires can constitute the HF

nanoresonators for future ultra-low-mass sensors.