ABSTRACT
Recently, nanowires have been developed to follow the well-known
Moore’s law and to evaluate the physical issues caused by the
dramatic reduction of the gate length of transistors. In this chapter,
we give a technical overview of suspended silicon nanowires
used as high-frequency (HF) vibrating nanoelectromechanical
systems (NEMS). Several applications are being addressed with
such nanosystems. Among them, nanowires can constitute the HF
nanoresonators for future ultra-low-mass sensors.