ABSTRACT
Next, we consider resist reactions under exposure. As the macromolecules are either downsized or upsized, what are the spatial inhomogeneities that are introduced? is is probably dierent between positive and negative resists. In the former case, typical size scale lengths range from the bond length between C atoms in an alkane chain backbone 1.554 Å (Beyer and Walter 1991, p. 96), over about 10 Å for the persistence length (local stiness) to about 100 Å of coil radius (Baschnagel et al. 2000).
