ABSTRACT

The best available method to study surfaces is the scanning electron microscope (SEM).

The main components of a scanning electron microscope are:

1. A fast-electron source (high-energy electrons) 2. A series of electromagnetic lenses responsible for

reducing the diameter of the electron beam 3. A scanning system that allows the electron beam to

traverse the surface of the sample 4. A series of detectors responsible for gathering

information from the electromagnetic signals produced by the sample-electron interaction (secondary, backscattered and x-ray)

5. A vacuum pump system, which prevents interaction between the emitted electrons and gas molecules in order to facilitate beam directionality.