ABSTRACT
Nanotechnology research led to the development of various instruments to be used for imaging or fabrication. The helium ion microscope (HIM) became available in 2006 but quickly gained popularity. Its unique gas field ion source enables high-resolution imaging, nanofabrication, direct write, and the recent combination with a secondary ion mass spectrometer offers chemical imaging with ~15 nm resolution. Particularly attractive are the small interaction volume of He and Ne (the two gases offered), small beam spot size, and a moderate sputtering rate. Additionally, the HIM is an excellent imaging tool for insulating samples in soft, polymeric, and biological materials. It can be expected that helium ion microscopy will continue to have a strong influence on broad range of scientific disciplines, including chemistry, materials science, and biology.
This chapter aims at providing an overview of the current status of HIM for imaging, analysis, and nanofabrication. It introduces the reader to key components of the instrument, theoretical background, and latest results in the areas of imaging, material fabrication, and chemical analysis capabilities of helium ion microscopy.
