ABSTRACT
An active vibration control system has been developed based upon analogue feedback and optical vibration sensing. ZnO thin films have been deposited using r.f. magnetron sputtering onto silicon substrates and cantilevers fabricated using photolithography. These cantilevers provide a means of actuation and micro-positioning. The system operates such that unwanted vibrations in the cantilever are removed and yet it remains possible to deflect the cantilever statically or dynamically as required. Results are presented for such a system.
