ABSTRACT
The finite element method (FEM) is a more general and powerful technique to model the real-world problems that involve complicated physics, geometry, and/or boundary conditions. The FEM is a numerical technique for finding approximate solutions to the boundary value problems for partial differential equations. This chapter summarizes the various aspects and utilization of FE modeling in nanoindentation based characterization techniques. This combined methodology can be used to predict stress-strain behavior, stress distribution, and so on, for small volume material, which is not possible by conventional mechanical characterization methods. The chapter discusses the basics of finite element method and nonlinear analysis. It describes the combined possibilities of finite element analysis and nanoindentation. The chapter then discusses the optimization technique used in combined FE nanoindentation simulation, and analyzes the issue of computation time, accuracy, and error of the FE based simulation work. It also presents the efficacy of the model predicting silicon and aluminum.
