ABSTRACT

This chapter discusses the methodologies and mechanisms for the controlled synthesis of carbon nanotubes and building micro- and nanoscale nanotube-based architectures using various chemical vapor deposition (CVD) methods and micro- and nanofabrication techniques. Single-walled carbon nanotubes (SWNTs) are made using a combination of metal catalysts and dense carbon vapor using a similar method for the multiwalled carbon nanotubes growth in the arc-discharge system. Scanning electron microscopes were employed to characterize the growth of carbon nanotubes and surface morphology of the designed substrates after nanotube growth. The vapor phase catalyst delivery method mentioned here is different from that used in conventional thermal CVD methods in which patterned catalysts on the designed positions need to be deposited on the substrate surfaces before carrying out CVD. The general approach for building density-controlled SWNT networks involves selecting optimal substrates and controlling CVD parameters such as the growth temperature, the flow rate of hydrocarbon gases, and the size of catalyst particles.