ABSTRACT

The energy fluxes determine the equilibrium temperature and, finally, the properties of the nano- and microparticles including crystallinity and stoichiometry. Among the various diagnostic methods, the determination of the energy fluxes to and from the dust particles is essential. Characterization and diagnostics of process plasmas that contain nano- and microparticles are absolutely necessary for the optimization of particle synthesis and their incorporation into nanocomposite films. Incandescent emission provides the possibility to easily determine temperatures of nano- and microparticles above 800 K. In the simple model, an idealized plasma is assumed where electrons show a Maxwellian velocity distribution with streaming ions at the sheath edge and where collisions are negligible. The simple model describes fluxes between plasma and the particle surface and was originally used in probe theory. Particle temperature measurements have been performed in argon as well as in an argon-hydrogen plasma environment.