ABSTRACT
The demand for a high resolution EDS microanalysis system has grown due to the needs of the scientist to analyze small particles on the SEM using low beam voltages. The conventional EDS semiconductor type detectors with energy resolutions of around 100eV at 3keV cannot adequately characterize low energy spectra due to the resolution limitations. The microcalorimeter type EDS detector, capable of resolutions <3eV at 1.5keV, enables the analysis of low energy spectra to be performed simply, without having to employ elaborate line overlap algorithms or alternative techniques for final elemental confirmation. The POLARIS microcalorimeter EDS system, developed by EDAX and CSP is a cryogen-free cooled unit designed with a fine energy resolution over a useable energy range extending the capabilities of EDS analysis systems attached to the SEM.
