ABSTRACT

MBE GalnP layers grown at temperatures ranging from 445°C to 510°C have been investigated using TED and RHEED. TED results show the presence of diffracted intensity at ½{111} B positions, indicating the occurrence of CuPt-B ordering. As the growth temperature increases, the superlattice spots move toward ½{-1+δ,1-δ,0} positions, where 8 is a positive value. In addition, for the layers grown at temperatures of 445–490°C, weak spots are observed at ½{111} A positions, indicating the formation of CuPt-A ordering. Based on the TED and RHEED results, explanations are given to describe the formation mechanisms of CuPt-A and B type ordering.