ABSTRACT
This chapter presents a flexible numerical approach to simulate the generation, diffusion and recombination processes characterising cathodoluminescence (CL), based on random walk Monte Carlo simulations in continuous space. Because of the large interest in CL a lot of methodological research has been so far developed for modelling the excitation of luminescence in a semiconductor through high energy electrons. In particular, the shape of energy loss curves, as calculated by Monte Carlo simulations, seems to be quite well established. The Monte Carlo simulation has been implemented in a routine named Aleatory Light from Electron Simulation and tested by comparison with an analytical model. The chapter describes a random walk algorithm for simulation diffusion in CL processes in semiconductors along with numerical checks of its reliability. Due to its generality it can be used to describe different physical situations of interest.
