chapter
Scanning Electron Microscopy
ByHarsh Sinha, Anadi Bhatia, Hong Xiao, Olivier Moreau, Paul MacDonald, Cecelia Campochiaro
Pages 14

A scanning electron microscope (SEM) can be effectively used to monitor device fabrication steps of plasma processing. High resolution, in combination with a range of imaging modes, creates multiple use cases for SEM. The electrical property of electrons creates voltage contrast that is a unique imaging mode, in comparison to other microscopes. All these make SEM a unique and vital metrology tool.