chapter
Nanotechnology: Plasma-Based
ByKostya (Ken) Ostrikov
Pages 13

Advances in science and applications of plasmas for the synthesis and processing of advanced nanomaterials are overviewed. The conceptual plasma nanoscience approach is used to identify the most appropriate low-temperature plasmas and processes to achieve specific morphological and structural features in the synthesis or processing of nanomaterials, which in turn determine their functional properties in nanodevice applications. The most common types of nanoscale materials with different dimensionalities are discussed.