chapter
Beam Plasmas: Materials Production
ByMichael Vasiliev, Tatiana Vasilieva
Pages 15

Applications of nonequilibrium plasmas excited by electron beams for the materials production are considered. Plasmachemical reactors and other industrial electron-beam plasma (EBP) systems are described. Examples of technologies for the production of functional materials, materials for microelectronics and photovoltaic, hydrophilic/hydrophobic materials as well as some “green” technologies are given. Production techniques of the bioactive materials by means of the EBP and properties of these materials are considered at large. Conventional and advanced technological applications of hybrid plasma (HP) systems of plasma generation by combined action of electron beams and gas discharges are presented as well.