ABSTRACT

Two-dimensional (2-D) fluid plasma modeling is a workhorse in both academia and industry. Compared to simple global models and more detailed three-dimensional (3-D) models, 2-D fluid modeling provides an ideal compromise between CPU time and the level of geometric detail. In its simplest form, fluid or continuum plasma modeling involves solving the moments of the Boltzmann’s equations for charged and neutral species. Plasma physics is characterized by a wide range of spatial and time scales, which makes the solution of the governing equations difficult without the use of simplifying assumptions or acceleration techniques. Plasma modeling has broad applications, some of which include lighting, semiconductor processing, flow control, electric propulsion, and medical applications. Challenges in plasma modeling include chemical mechanism development, coupled plasma and electromagnetic effects, and low-pressure physics.